Micro and Nanofabrication

This course is an introduction to the fundamentals of micro and nanofabrication processes. The topics will include introduction to scaling laws, nanostructures and nanodevices with general approaches to fabrication and characterization. Lectures will also include the physical principles of optical lithography, electron-beam lithography, alternative nanolithography techniques, and thin film deposition, self-assembly and wet and dry etching. Students are expected to gain an understanding on cleanroom concepts and safety protocols and will have opportunities to experience imaging and characterization of micro and nanostructures. Examples of practical existing and emerging micro and nanodevices and applications will be surveyed briefly.