Introduction to MEMS

This course provides an introduction to the principles and practices of the microelectromechanical systems (MEMS). Topics include material properties, microfabrication techniques, sensing and actuation principles, and application of MEMS in solving biomedical problems. Students will use the Microfabrication and BioMEMS Lab to various aspects of MEMS device design, modeling, fabrication, characterization, and testing.